流体 | 应用 | 过滤器推荐 | 备注 | | 气体 | | | Facitilites | POU | | H2 | CVD,PECVDorMOCVD | PTFE膜/PP支撑滤芯 | | Discuss benefits with customers | Ar | CVD, PECVD,PVD,sputtering | PTFE膜/PP支撑滤芯 | N2 | CVD,PECVD ,CSS | PTFE膜/PP支撑滤芯 | He | CVDorPECVD | PTFE膜/PP支撑滤芯 | NH3 | CVDorPECVD | PTFE膜/PP支撑滤芯 | O2 | PVD, | PTFE膜/PP支撑滤芯 | (Trichloro)Silane | CVDorPECVD | PTFE膜/PP支撑滤芯 | Diborane | CVDorPECVD | PTFE膜/PP支撑滤芯 | Phosphine | CVDorPECVD | PTFE膜/PP支撑滤芯 | SiH4, GeH4, CH4 | PEVCD | PTFE膜/PP支撑滤芯 | DI水 | Pre RO | | 熔喷滤芯 | | 5um | Resin Trap | | PP折叠或熔喷滤芯 | | 1-3um | POU | rinsing,cleaning,dilution | | PES膜滤芯 | 0.1-0.2um | | 废水处理 | | from wafer shaping ﹠ curring | 线绕滤芯 | | | 化学品过滤 | HF | etching,cleaning | PES(聚醚砜)膜滤芯 | | 精度选择0.1,0.2或 1um | HNO3 | etching,cleaning | PTFE膜/PP支撑滤芯 | | H2PO4 | etching | PTFE膜/PP支撑滤芯 | | Acetic Acid | etching,cleaning | PTFE膜/PP支撑滤芯 | | NaOH | etching,cleaning | PP折叠或PES膜滤芯 | | KOH | etching,cleaning | PP折叠或PES膜滤芯 | | IPA, | etching,cleaning | PP折叠滤芯 | | HCl | cleaning | PP折叠或PES膜滤芯 | | POCL3 | n-doping | PTFE膜/PP支撑滤芯 | | SC1/SC2 | cleaning | PTFE膜/PP支撑滤芯 | | Electroless Plating Soln | Front,contact | PTFE膜/PP支撑滤芯 | | SnCl4 solutiln. aq. | formation of SnO2 contact | PP折叠或PES膜滤芯 | | SLURRY | Silicon carbide +PEG | wafer slicing | PP折叠或线绕滤芯 | 5um | | 金属电镀 | Silver ,Aluminum | screen-printing | PP折叠滤芯 | 看是否必要 |
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