膜厚测试仪F20

膜厚测试仪F20

品名：膜厚测试仪

Description： Filmthickness tester

品牌: FILMETRICS

Brand:FILMETRICS

型号：F20

Model:F20

工作原理:

当入射光穿透不同物质的界面时将会有部份的光被反射，由于光的波动性导致从多个界面的反射光彼此干涉，从而使反射光的多波长光谱产生振荡的现象。从光谱的震荡频率，愈多的震荡代表较大的厚度。而其他的材料特性如折射率与粗糙度也也能同时测量。

Working principle:

Whenincident light penetrates the interface of different substances, part of thelight is reflected, and the reflected light from the plurality of interfacesinterferes with each other due to the fluctuation of the light, so that themulti-wavelength spectrum of the reflected light oscillates. From theoscillation frequency of the spectrum, the more oscillations represent a largerthickness. Other material properties such as refractive index and roughness canalso be measured simultaneously.

技术参数:

1.光谱波长范围：380～1050nm

2.光源：内置钨卤素灯

3.厚度测量范围：15nm～250um

4.测量n&k最小厚度：100nm

5.准确度（取较大者）：2nm或0.2%

6.精度：0.02nm

7.稳定性：0.05nm

8.光斑大小：1.5mm

9.样品直径：直径从1mm到300mm或更大

10.电源：100～240VAC，50-60HZ

Technical parameters:

1.Spectral wavelength range: 380 ~ 1050nm

2.Light source: built-in tungsten halogen lamp

3.Thickness measurement range: 15nm~250um

4.Measure the minimum thickness of n&k: 100nm

5.Accuracy (whichever is greater): 2nm or 0.2%

6.Accuracy: 0.02nm

7.Stability: 0.05nm

8.Spot size: 1.5mm

9.Sample diameter: diameter from 1mm to 300mm or more

10.Power: 100 ~ 240VAC, 50-60HZ

基本应用:

基本上所有光滑的、半透明或低吸收系数薄膜都可以测量。这包括几乎所有的电介质与半导体材料，例如：

Basic application:

Essentiallyall smooth, translucent or low absorption coefficient films can be measured.This includes almost all dielectric and semiconductor materials, such as。