新一代多功能过滤器简介

guolvfenlitech1

2022-10-18   环球过滤分离技术网   guolvfenlitech1

AsteraTM过滤器采用PAS薄膜

确保可靠且可重复的工艺

基于 Guardian® PS 过滤器的坚实基础。全新的Astera过滤器采用聚芳砜（Polyarylsulfone, PAS）薄膜，将化学品纯度提升到更高水平，这意味着颗粒、凝胶、有机物及其他材料导致的缺陷更少，从而确保可靠且可重复的工艺。

广泛应用于稀释的水性化学品

助力简化您的污染控制策略

近期，随着晶圆厂产能利用率的不断提升，节约集成电路的制造时间，对保障准时交付和履行客户承诺至关重要。

目前，污染控制已被证实对良率和设备效率都会产生积极的影响，而液体过滤器的可靠性和效率因此扮演关键角色。

Astera过滤器可广泛应用于水性化学品制程，提供一种多功能的污染控制解决方案，可降低过滤器库存，助力简化您的污染控制策略。

应用范围

• Acid-based process chemicals such as BOE and DHF
• Basic process chemicals such as NH4OH and TMAH
• DI water
• Bulk and point of use
• Low-temperature processes (<70°C [158°F])
  
  

优势和效益

Advanced 10 nm rated PAS membrane

• Ensures chemical purity, providing lower baseline WPA
  
  

DI water prewet packaging

• Enables fast flush up, which reduces downtime and allows faster release to production
  
  

High flow membrane

• Enables fast flush up and facility chemical throughput, which reduces downtime and allows faster release to production
  
  

Native, unmodified membrane

• Provides advanced particle retention at all pH levels, reducing inventory with a single product for multiple dilute applications
  
  

Standard clean with metals specification

• Allows repeatable flush up time, enabling predictable PM downtime schedule
  
  

来源于：Entegris，侵权告删 www.guolvfenlitech.com